FEATURES OF LIQUID-PHASE MAGNETRON SPUTTERING PROCESS FOR VARIOUS MATERIALS
The article considers the features of liquid-phase magnetron sputtering (LPMS) process for various materials. It is noted that LPMS method due to its versatility and environmental friendliness has great potential to replace existing production methods developed to form thick layers of metallization for various purposes.
Tags: classification liquid-phase magnetron sputtering material metallization жидкофазное магнетронное распыление классификация материал металлизация
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