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Issue #6/2020
V. Andriyanov, S. Sidelnikov, S. Goryachkin
Seed rotary and movement drive for Czochralski silicon monocrystals growth setup
Seed rotary and movement drive for Czochralski silicon monocrystals growth setup
DOI: 10.22184/1992-4178.2020.197.6.110.112
The article considers the design of seed rotation and movement drive for the installations for growing silicon monocrystals by Czochralski method. It is noted that the drive features are the use of cylindrical differential in the kinematics and the use of a chain as a flexible suspension.
The article considers the design of seed rotation and movement drive for the installations for growing silicon monocrystals by Czochralski method. It is noted that the drive features are the use of cylindrical differential in the kinematics and the use of a chain as a flexible suspension.
Теги: czochralski method drive monocrystalline silicon seed затравка метод чохральского монокристаллический кремний привод
Seed rotary and movement drive for Czochralski silicon monocrystals growth setup
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