rus
Issue #3/2026
V. Plebanovich, A. Suchkov, V. Grishkevich, V. Svetenkova
APPLICATION OF PHOTON EMISSION MICROSCOPY FOR QUALITY CONTROL AND FAILURE ANALYSIS OF ICs
APPLICATION OF PHOTON EMISSION MICROSCOPY FOR QUALITY CONTROL AND FAILURE ANALYSIS OF ICs
DOI: 10.22184/1992-4178.2026.255.3.184.188
The article presents an overview of the physical mechanisms of photon generation in semiconductor structures, describes the main operating modes of PEM systems, and describes the method’s capabilities for localizing various types of defects. Practical examples of the method’s application in microelectronics development and production are provided.
Tags: foton complex ics microscopy pem system photon emission ис комплекс фотон микроскопия фотонная эмиссия фэм-система
Subscribe to the journal Electronics: STB to read the full article.
The article presents an overview of the physical mechanisms of photon generation in semiconductor structures, describes the main operating modes of PEM systems, and describes the method’s capabilities for localizing various types of defects. Practical examples of the method’s application in microelectronics development and production are provided.
Tags: foton complex ics microscopy pem system photon emission ис комплекс фотон микроскопия фотонная эмиссия фэм-система
Subscribe to the journal Electronics: STB to read the full article.
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