rus
Issue #6/2025
V. Kochemasov, V. Gorbachev, S. Khorev
HIGH-FREQUENCY CAPACITORS MANUFACTURED USING MEMS TECHNOLOGY
HIGH-FREQUENCY CAPACITORS MANUFACTURED USING MEMS TECHNOLOGY
DOI: 10.22184/1992-4178.2025.247.6.116.124
The article provides an overview of the main technologies used to manufacture microelectromechanical systems (MEMS). It examines the design features of MEMS capacitors and their operating principles, and provides examples
of devices based on them.
The article provides an overview of the main technologies used to manufacture microelectromechanical systems (MEMS). It examines the design features of MEMS capacitors and their operating principles, and provides examples
of devices based on them.
Теги: cmos fractal capacitor mems capacitor mems microphone mems-конденсатор mems-микрофон microfabrication technology variable capacitance кмоп переменная емкость технологии микрообработки фрактальный конденсатор
HIGH-FREQUENCY CAPACITORS MANUFACTURED USING MEMS TECHNOLOGY
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