rus
Issue #7/2024
S. Dubyaga, I. Kozyrev
EVERY ATOM COUNTS: THE USE OF HIGH-PURITY GASES IN THE MICROELECTRONICS INDUSTRY
EVERY ATOM COUNTS: THE USE OF HIGH-PURITY GASES IN THE MICROELECTRONICS INDUSTRY
DOI: 10.22184/1992-4178.2024.238.7.190.191
HORST LLC is the main supplier of high-purity gases
for the microelectronics industry of Russia and Belarus, having its own production facilities. The article discusses the features of technologies for the production and deep purification of gases used in the production of semiconductor materials.
HORST LLC is the main supplier of high-purity gases
for the microelectronics industry of Russia and Belarus, having its own production facilities. The article discusses the features of technologies for the production and deep purification of gases used in the production of semiconductor materials.
Теги: high-purity gases reaction-rectification unit zero-waste production безотходное производство высокочистые газы реакционно-ректификационная установка
EVERY ATOM COUNTS: THE USE OF HIGH-PURITY GASES IN THE MICROELECTRONICS INDUSTRY
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