rus
Issue #7/2025
V. Plebanovich, V. Grishkevich
DEEP ULTRAVIOLET MICROSCOPY: PRINCIPLES AND PROSPECTS OF APPLICATION IN INDUSTRY AND SCIENCE
DEEP ULTRAVIOLET MICROSCOPY: PRINCIPLES AND PROSPECTS OF APPLICATION IN INDUSTRY AND SCIENCE
DOI: 10.22184/1992-4178.2025.249.7.120.124
The article reviews the physical foundations and practice of application of DUV-microscopy. The development of laser technologies and the emergence of new sensors, modern optical materials opens the way to its widespread implementation in microelectronics, biomedicine and materials science.
Tags: источники duv-излучения наноструктуры разрешающая способность ультрафиолетовая микроскопия
Subscribe to the journal Electronics: STB to read the full article.
The article reviews the physical foundations and practice of application of DUV-microscopy. The development of laser technologies and the emergence of new sensors, modern optical materials opens the way to its widespread implementation in microelectronics, biomedicine and materials science.
Tags: источники duv-излучения наноструктуры разрешающая способность ультрафиолетовая микроскопия
Subscribe to the journal Electronics: STB to read the full article.
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