rus
DOI: 10.22184/1992-4178.2026.254.2.118.122
The article summarizes modern methods and applications of ion chromatography for the analysis of ultrapure water, chemical reagents, silicon wafer surfaces and cleanroom atmospheres.
The prospects for integrating this method into high-tech industrial environments are discussed.
Tags: chemical reagents eluent ion chromatography ion exchange column silicon wafers ultrapure water ионная хроматография ионообменная колонка кремниевые пластины ультрачистая вода химические реактивы элюент
Subscribe to the journal Electronics: STB to read the full article.
The article summarizes modern methods and applications of ion chromatography for the analysis of ultrapure water, chemical reagents, silicon wafer surfaces and cleanroom atmospheres.
The prospects for integrating this method into high-tech industrial environments are discussed.
Tags: chemical reagents eluent ion chromatography ion exchange column silicon wafers ultrapure water ионная хроматография ионообменная колонка кремниевые пластины ультрачистая вода химические реактивы элюент
Subscribe to the journal Electronics: STB to read the full article.
Readers feedback
