rus
Issue #9/2021
D. Sukhanov
OPTIMIZATION OF GALVANIC PROCESSES IN MODERN SEMICONDUCTOR MANUFACTURING. Part 1
OPTIMIZATION OF GALVANIC PROCESSES IN MODERN SEMICONDUCTOR MANUFACTURING. Part 1
DOI: 10.22184/1992-4178.2021.210.9.86.93
The article reviews the galvanic processes used in modern semiconductor manufacturing. Information is provided on the basic principles and methods of optimizing such processes.
The article reviews the galvanic processes used in modern semiconductor manufacturing. Information is provided on the basic principles and methods of optimizing such processes.
Теги: electrolytic cell galvanic process reactor semiconductor wafer гальванический процесс полупроводниковая пластина реактор электролитическая ячейка
OPTIMIZATION OF GALVANIC PROCESSES IN MODERN SEMICONDUCTOR MANUFACTURING. Part 1
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